J. Electrochem. Soc. 1996 volume 143, issue 10, p. 3279-3284
Identification and Removal of Trace Organic Contamination on Silicon Wafers Stared in Plastic Boxes
Koichiro Saga and Takeshi Hattori
- DOI:
http://dx.doi.org/10.1149/1.1837198
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http://jes.ecsdl.org/content/143/10/3279.abstractInfluence of Organic Contamination on Silicon Dioxide Integrity
Fumitoshi Sugimoto, Sigeru Okamura, Takao Inokuma, Yoshihiro Kurata and Seiichi Hasegawa
- DOI:
http://dx.doi.org/10.1143/JJAP.39.2497
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http://jjap.jsap.jp/link?JJAP/39/2497/