Journal of Vacuum Science & Technology A Volume 29 Issue 2 021015 (2011)
Ripple formation on atomically flat cleaved Si surface with roughness of 0.038 nm rms by low-energy Ar1+ ion bombardment
Shahjada A. Pahlovy, S. F. Mahmud, K. Yanagimoto, and I. Miyamoto
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http://dx.doi.org/10.1116/1.3554636