Heat transfer and mass transport in a multiwafer MOVPE reactor: modelling and experimental studies
T. Bergunde, M. Dauelsberg, L. Kadinski, Yu. N. Makarov, M. Weyers, D. Schmitz, G. Strauch and H. Jürgensen
Journal of Crystal Growth,Volume 170, Issues 1-4, 1 January 1997, Pages 66-71
- DOI:
http://dx.doi.org/10.1016/S0022-0248(96)00551-9