1. Yu W., Lu W.B., Yang Y.B., Wang C.S., Zhang L., Fu G.S. - Fabrication of nanocrystalline silicon carbide thin film by helicon wave plasma enhanced chemical vapour deposition. // Thin Solid Films. 2007. V. 515. N. 5. P. 2949 - 2953.
Код: Выделить всё
http://dx.doi.org/10.1016/j.tsf.2006.08.038
