1.Ruey-Lin Ueng, Shiuh-Jen Jiang, Chia-Ching Wan, A.C. Sahayam
Microwave-assisted volatilization of silicon fluorides for the determination of trace impurities in high purity silicon powder and quartz by ICP-MS.
Analytica Chimica Acta, Volume 536, Issues 1-2, 22 April 2005, Pages 295-299
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http://dx.doi.org/10.1016/j.aca.2004.12.040Microwave assisted volatilization of silicon as fluoride for the trace impurity determination in silicon nitride by dynamic reaction cell inductively coupled plasma-mass spectrometry.
Analytica Chimica Acta, Volume 605, Issue 2, 19 December 2007, Pages 130-133
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http://dx.doi.org/10.1016/j.aca.2007.10.043