Super-High-Frequency Band Filters Configured with Air-Gap-Type Thin-Film Bulk Acoustic Resonators
Motoaki Hara, Tsuyoshi Yokoyama, Takeshi Sakashita, Shinji Taniguchi, Masafumi Iwaki, Tokihiro Nishihara, Masanori Ueda and Yoshio Satoh
- DOI:
http://dx.doi.org/10.1143/JJAP.49.07HD13