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Thermodynamic Analysis of Hydride Vapor Phase Epitaxy of GaN.
Akinori Koukitu, Shin-ichi Hama, Tetsuya Taki and Hisashi Seki
Department of Applied Chemistry, Faculty of Technology, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184, Japan
(Received December 8, 1997; accepted for publication January 13, 1998)
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http:/dx.doi.org/10.1143/JJAP.37.762
