Помогите, пожалуйста, ознакомиться с работой:
Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition
Paul Poodt, David C. Cameron, Eric Dickey, Steven M. George, Vladimir Kuznetsov, Gregory N. Parsons, Fred Roozeboom, Ganesh Sundaram, and Ad Vermeer
J. Vac. Sci. Technol. A 30, 010802 (2012)
- DOI:
http://dx.doi.org/10.1116/1.3670745
