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Multi-scale modeling of chemical vapor deposition processes for thin film technology
C.R. Kleijn, R. Dorsman, K.J. Kuijlaars, M. Okkerse, H. van Santen
Journal of Crystal Growth
Volume 303, Issue 1, 1 May 2007, Pages 362-380
- DOI:
http://dx.doi.org/10.1016/j.jcrysgro.2006.12.062
