Thermal and Mechanical Properties of Silicon Tetrachloride (SiCl4) and Germanium Tetrachloride (GeCl4) in Their Vapor and Liquid Phases
O. P. Prat, T. Cloitre, R.-L. Aulombard
Chemical Vapor Deposition
2007, Volume 13 Issue 5, Pages 199 - 203
- DOI:
http://dx.doi.org/10.1002/cvde.200604242