Xia M. J., Ding H. Y., Zhou G. H., Zhang Y., Zhuang G. Z. - Effect of power on microstructure and hardness of sputtered TiB2 films. // Advanced Materials Research. 2013. V. 647. P. 697 - 700.
Код: Выделить всё
http://dx.doi.org/10.4028/www.scientific.net/AMR.647.697